|
with |
Magnetic Encoder |
Optical Encoder |
|||
|
|
5.0µm |
1µm |
0.5µm |
1.0µm |
5.0µm |
|
Peak Velocity [m/s] |
7 |
2.5 |
3 |
5 |
5 |
|
Resolution [µm] |
5 |
1 |
0.5 |
1.0 |
5.0 |
|
Repeatability [µm] |
±5.0 |
±1 |
±0.5 |
±1.0 |
±5.0 |