Ultra Precision Series

Linear motor driven Ultra Stages
Linear Motor Ultra Stages can achieve sub-micron accuracy with position repeatability of + 1 encoder count. Featuring Parker Bayside's patented AutoFlex Preload, Linear Motor Ultra Stages provide exceptional smoothness of motion for constant velocity requirements in scanning applications. The AutoFlex preload provides a unique thermal compensation method, eliminating any effects of expansion / contraction on bearing performance. The brushless linear motor is mounted inverted, with the ironless coil attached to the stationary base, eliminating moving wires.

Screw Driven Ultra Stages
Traditional Ultra Stages are provided with either a ball screw or lead screw mounted alongside the stage.
This stage configuration allows easy mounting of any step or servo motor with a flexible coupling. The ball screw version provides high speed and high force for dynamic move-and-settle applications.
The lead screw version provides exceptional smoothness for slow speed scanning. Both the lead screw and ball screw models are available with linear encoders, providing high positional accuracy and repeatability. envelopes.

Screw Driven

 

 U200

 U300

 U400

 U600

Width [mm]

200

300

400

600

Travel [mm]

100-400

200-500

300-500

500

Max. Velocity [mm/s]

100...300

100...300

100...300

100...300

Max. Load [kg]

1859

2187

2187

2187

Peak Force[N]

110...880

110...880

110...880

110...880

Repeatability [µm]

±2

±2

±2

±2

Frame Design

Closed

Open&Closed

Open&Closed

Open&Closed

 

Linear motor driven

 

 U200

 U300

 U400

 U600

Width [mm]

200

300

400

600

Travel [mm]

100-400

200-500

300-500

500

Max. Velocity [mm/s]

1500

1500

1500

1500

Cont. Force [N]

38

76

122

122

Peak Force[N]

120

240

400

400

Repeatability [µm]

±0.5

±0.5

±0.5

±0.5

Frame Design

Closed

Open&Closed

Open&Closed

Open&Closed